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Influence of concentration gradients and surface roughness on measured reduced thicknesses of overlayers
Affiliation:1. Department of Civil, Environmental and Ocean Engineering, Stevens Institute of Technology, Hoboken, NJ 07030, USA;2. Enviromicrobiology, Ecotoxicology and Ecotechnology Research Laboratory, Department of Ecological Studies, University of Kalyani, Kalyani, Nadia 741235, West Bengal, India;3. International Centre for Ecological Engineering, University of Kalyani, Kalyani 741235, West Bengal, India;4. Department of Biological Sciences, Michigan Technological University, Houghton, MI 49931, USA;1. Department of Energy Conversion Systems, Korea Institute of Machinery and Materials, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 34103, South Korea;2. Mechanical Engineering Department, Erik Jonsson School of Engineering and Computer Science, The University of Texas at Dallas, 800 W. Campbell Rd., Richardson, TX 75080, USA;1. School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy., Crawley, Western Australia 6009, Australia;2. School of Chemistry and Biochemistry, The University of Western Australia, 35 Stirling Hwy., Crawley, Western Australia 6009, Australia;3. CSIRO Earth Science and Resource Engineering, Kensington, Western Australia 6151, Australia;4. Department of Exploration Geophysics, Curtin University of Technology, 26 Dick Perry Avenue, ARRC, Kensington, Western Australia 6151, Australia;1. School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy., Perth, WA 6009, Australia;2. Department of Engineering, Macquarie University, NSW 2109, Australia;3. School of Molecular Sciences, The University of Western Australia, 35 Stirling Hwy., Perth, WA 6009, Australia;4. CSIRO Energy Flagship, Kensington, WA 6151, Australia;5. Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, USA;1. School of Engineering, The University of Western Australia, Perth, WA 6009, Australia;2. School of Molecular Sciences, The University of Western Australia, Perth, WA 6009, Australia;3. Material Science and Engineering Department, University of Washington, Seattle, WA 98195-2120, USA;4. Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA 93106-9560, USA
Abstract:In principle, one expects from a method for the determination of thicknesses of thin overlayers no angular dependence (take-off angle ϵ) of the results, which means d/λ = const. Earlier investigations, however, gave evidence for such a constant response of d/λ versus ϵ only up to about ϵ = 40 to 70° (depending on the value of d/λ) followed by a drop. This drop is explained by the finite solid angle of detection and elastic scattering of photoelectrons. As a concentration gradient exists in the interface, a horizontal portion (d/λ = const.) is only obtained for thick overlayers on thin interfaces. Surface roughness causes a restriction of the horizontal portion and in addition systematic errors.
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