(1) Ioffe Physicotechnical Institute, Russian Academy of Science, ul. Politekhnicheskaya 26, St. Petersburg, 194021, Russia;(2) Korean Research Institute of Standards and Science, Taejn, Republic of Korea
Abstract:
A Monte Carlo-based method for computing electron-target inelastic interaction is presented. It uses the double-differential inelastic scattering cross section. A resource-saving algorithm that simulates the interaction using the double-differential cross section was elaborated. The cross section was calculated from data on the optical permittivity of the target.