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| 准分子激光蒸发YBa2Cu,sub>3C7-x靶产生等离子体的膨胀过程研究 | |
| 引用本文： | 焦树良,刘大明,官文杰,李再光.准分子激光蒸发YBa2Cu,sub>3C7-x靶产生等离子体的膨胀过程研究[J].光学学报,1992,12(12):1117-1122. |
| 作者姓名： | 焦树良 刘大明 官文杰 李再光 |
| 作者单位： | 焦树良:华中理工大学激光技术国家实验室, 武汉 430074 刘大明:华中理工大学激光技术国家实验室, 武汉 430074 官文杰:华中理工大学激光技术国家实验室, 武汉 430074 李再光:华中理工大学激光技术国家实验室, 武汉 430074 |
| 摘 要： | 对XeCl准分子激光蒸发YBa2Cu3O7-x陶瓷靶产生的等离子体进行了实验和理论研究.利用发射光谱,分辨出等离子体内的各种粒子.并对各种粒子进行了飞行时间谱测量.在实验的基础上,建立了一个等离子体的膨胀模型.计算结果与实验符合较好. |
| 关 键 词： | 激光等离子体 飞行时间谱 超导薄膜 |
| 收稿时间： | 1991/12/31 |
Plasma expansion produced by excimer laser evaporation of YBa2Cu,sub>3C7-xtarget |
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| Abstract: | The experimental and theoretical investigations of the plasma produced by XeCl excimer laser evaporation of YBa2Cu3O7-aaaaaaaaaaaaaaaaa target are presented in this paper. The plasma emission spectrum was analysed with the Optical Spectrum Analyser (OSA) and a series of species in the plasma plume were resolved. Then the time-of-flight spectra of the species were measured using a monochromator with an optical fibre sampling system. An expansion model of the plasma plume was suggested on the basis of the experiment. By using the model, the time-of-flight spectra, the spatial characteristics of the plsma plume and the distribution of the superconducting thin film thickness deposited by the plasma were simulated. The calculaton results are in good agreement with the deposition experiments. |
| Keywords: | laser plasma time-of-flight spectrum Superconducting thin film |