Kinetics of surface monatomic layer deposition

The filling of a surface layer with atoms incident from the outside has been studied in the framework of a one-dimensional model. Macroscopic dynamic equilibrium is regarded as the result of microscopic equilibrium between possible atomic configurations in the presence of particle flux to the surface, the evaporation of these particles, and their mutual influence. The dependences of the degree of surface coverage on the external action intensity, features of atom-substrate interaction and interaction between atoms are found. The conditions for the formation of a rarified layer, its complete filling, clot formation, and regular distribution were determined.