Scaling laws for the spatial distributions of the plasma parameters in the positive column of a dc oxygen discharge

Comprehensive self-consistent simulations of the positive column plasma of a dc oxygen discharge are performed with the help of commercial CFDRC software (), which enables one to carry out computations in an arbitrary 3D geometry using fluid equations for heavy components and a kinetic equation for electrons. The main scaling laws for the spatial distributions of charged particles are determined. These scaling laws are found to be quite different in the parameter ranges that are dominated by different physical processes. At low pressures, both the electrons and negative ions in the inner discharge region obey a Boltzmann distribution; as a result, a flat profile of the electron density and a parabolic profile of the ion density are established there. In the ion balance, transport processes prevail, so that ion heating in an electric field dramatically affects the spatial distribution of the charged particles. At elevated pressures, the volume processes prevail in the balance of negative ions and the profiles of the charged particle densities in the inner region turn out to be similar to each other.