Fabrication of ITO diffraction grating structure for infrared plasmonics by thermal nanoimprint lithography |
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| Authors: | Hasuike Noriyuki Maeda Takeshi Takeda Minoru |
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| Affiliation: | 1.Department of Electronics, Kyoto Institute of Technology, Matsugasaki, Kyoto, Sakyo-ku, 606-8585, Japan
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| Abstract: | Optical Review - Indium tin oxide (ITO) diffraction grating was fabricated on a polyimide (PI) film by using a combination of thermal nanoimprint lithography (NIL) process and radio frequency (RF)... |
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