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Sequential reactions of silicon clusters with SiD4: constrained heterogeneous nucleation of deuterated silicon particles
Authors:M L Mandich  W D Reents Jr
Institution:1. AT&T Bell Laboratories, 07974, Murray Hill, NJ, USA
Abstract:The sequential clustering reactions of gas phase silicon cluster ions are ideally suited for studying heterogeneous nucleation of silicon particles. Stepwise reactions of silicon cluster ions with silane have been observed which lead to growth of larger deuterated silicon clusters. Extensive information is obtained about their exothermic gas phase reaction rates and product distributions as a function of cluster size and degree of hydrogenation. What is found is that each size of silicon cluster exhibits a unique pattern of growth. Furthermore, nearly all of the silicon clusters encounter chemical constraints to rapid nucleation. These constraints are a consequence of specific electronic and structural requirements in the chemical reactions. The nature of these requirements are deduced using experimental results in concert with ab initio electronic structure theoretical calculations of the energetics and structures of various species.
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