Effect of chemisorption of donor and acceptor gases on the semiconductor-metal phase transition in vanadium dioxide films |
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| Authors: | E. A. Tutov V. P. Zlomanov |
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| Affiliation: | 1. Voronezh State University, Universitetskaya pl. 1, Voronezh, 394006, Russia
2. Moscow State University, Moscow, 119991, Russia
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| Abstract: | Heterophase textured films of vanadium dioxide on single-crystal silicon substrates have been synthesized by the sol-gel method from solutions of triethoxyvanadyl VO(OEt)3 in methyl cellosolve CH3OCH2CH2OH. The effect of ozone and ethanol vapor chemisorption on the parameters of the semiconductor-metal phase transition in vanadium dioxide VO2(B) has been studied. It has been found that the transition temperature increases in a reducing atmosphere and decreases in an oxidizing atmosphere. |
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