| 薄膜材料横向热扩散率的热辐射检测 |
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| 引用本文： | 钱梦畦,张翼. 薄膜材料横向热扩散率的热辐射检测[J]. 应用声学, 1995, 14(1): 8-12 |
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| 作者姓名： | 钱梦畦 张翼 |
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| 作者单位： | 同济大学声学研究所!上海;200092;同济大学声学研究所!上海;200092 |
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| 摘 要： | 利用薄膜材料横向尺寸远大于其厚度的特点，通过测量横向传播热波的幅值和相位来确定薄膜的热扩散率是可行的，本文介绍带有背衬的薄膜的横向热扩散率的检测理论，以及利用非接触的热辐射技术对金刚石－硅复合膜的检测结果。
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| 关 键 词： | 横向热扩散率 热辐射 金刚石膜 薄膜材料 |
Measurement of lateral thermal dlffusivity of athin film by thermal radiometry |
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| Qian Menglu and Zhang Yi. Measurement of lateral thermal dlffusivity of athin film by thermal radiometry[J]. Applied Acoustics(China), 1995, 14(1): 8-12 |
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| Authors: | Qian Menglu and Zhang Yi |
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| Affiliation: | Tongji University, Institute of Acoustics, Shanghai 200092;Tongji University, Institute of Acoustics, Shanghai 200092 |
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| Abstract: | It is possible to measure the lateral thermal diffusivity of a thin film because the lateral dimensions of film are far lager than its thickness. The theory about measuring the lateral thermal diffusivity of a film covered on a backing material is discussed. The experimental results obtained by thermal radiometry on the lateral thermal diffusivity of a Diamond-Silicon two-laycr film are presented. |
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| Keywords: | Lateral thermal diffusivity Thermal radiometry Diamond film |
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