| 探测器像素尺寸对PMP测量精度的影响研究 |
| |
| 引用本文： | 李勇,苏显渝,叶茂群.探测器像素尺寸对PMP测量精度的影响研究[J].光学与光电技术,2008,6(3):61-64. |
| |
| 作者姓名： | 李勇 苏显渝 叶茂群 |
| |
| 作者单位： | 1. 浙江师范大学信息光学研究所,浙江,金华,321004
2. 四川大学光电科学技术系,四川,成都,610064 |
| |
| 摘 要： | 以阶跃型反射率分布为例，分析了像素尺寸对相位测量轮廓术（PMP）测量精度的影响情况。仿真结果表明相位测量误差大小随感光单元覆盖的相位范围增加而增加，即采用高分辨率探测器可以得到高的测量精度；相位测量误差大小与阶跃在感光单元上的位置有关，存在导致最大误差的位置，并且该位置与阶跃相对幅值有关；相位测量误差大小随阶跃相对幅值增大而增大，偏向反射率高的方向。研究结果为PMP测量系统设计中图像探测器选择、测量精度评价提供了依据。
|
| 关 键 词： | 相位测量轮廓术 像素尺寸 积分采样 测量误差 |
| 文章编号： | 1672-3392(2008)03-0061-03 |
| 收稿时间： | 2007/7/9 |
| 修稿时间： | 2007年7月9日 |
Measurement Error of PMP Caused by Pixel Size of Detector |
| |
| LI Yong,SU Xian-yu,YE Mao-qun.Measurement Error of PMP Caused by Pixel Size of Detector[J].optics&optoelectronic technology,2008,6(3):61-64. |
| |
| Authors: | LI Yong SU Xian-yu YE Mao-qun |
| |
| Institution: | LI Yong1 SU Xian-yu2 YE Mao-qun1(1 Institute of Information Optics,Zhejiang Normal University,Jinhua 321004,China,2 Opto-Electronics Department,Sichuan University,Chengdu 610064,China) |
| |
| Abstract: | The measurement error of phase measurement profilometry caused by pixel size of detector under step distribution of reflection rate is studied through theoretical analysis and simulation.The results are gained as follows.First,measurement error of phase is increased as the phase range covered by pixel increases.It means that higher measurement accuracy could be obtained if detector with higher resolution is used.Second,the error is related to the position of step on photosensor unit.It exists that a positio... |
| |
| Keywords: | phase measurement profilometry pixel size integrating and sampling measurement error |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
