Application of high-resolution EFTEM SI in an AEM |
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Authors: | Bernhard Schaffer Werner Grogger Gerald Kothleitner Ferdinand Hofer |
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Institution: | (1) Institute for Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria |
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Abstract: | In this work we show how energy-filtered imaging can be used to obtain spectrum images of electron energy-loss spectrometric
data. Focus is placed on improved energy resolution within these data sets. Using two multilayer samples (GaN/AlN and InP/InAs),
we demonstrate the advantages of spectrum-imaging and its extended mapping capabilities. Plasmon-ratio maps are used to quickly
create high-contrast material maps with high signal-to-noise ratio, ratio-contrast plots are used to gain optimum settings
for the ratio maps, and plasmon-position maps are used to map small shifts of the energy position of bulk plasmon peaks.
Figure Scheme of EELS SI and derived plasman-position map |
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Keywords: | Spectrum-imaging Energy-filtered transmission electron microscopy Electron energy loss spectrometry GaN/AlN InP/InAs |
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