| 制作工艺误差对X射线组合折射透镜聚焦性能影响研究 |
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| 引用本文： | 乐孜纯,张明,董文,全必胜,刘魏,刘恺. 制作工艺误差对X射线组合折射透镜聚焦性能影响研究[J]. 物理学报, 2010, 59(9): 6284-6289 |
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| 作者姓名： | 乐孜纯 张明 董文 全必胜 刘魏 刘恺 |
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| 作者单位： | 浙江工业大学理学院应用物理系,杭州 310032 |
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| 基金项目： | 国家自然科学基金(批准号:60672014 )和浙江省自然科学基金杰出青年团队项目(批准号:R107377)资助的课题. |
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| 摘 要： | 本文主要介绍对X射线组合折射透镜的制作工艺误差对其聚焦性能影响的研究结果. 首先给出采用深度X射线光刻技术制作的PMMA材料圆柱面型X组合折射透镜的工艺测试结果,得出制作工艺误差值,定性分析制作工艺误差对X射线组合折射透镜聚焦性能的影响. 然后根据实际的制作工艺误差建模,给出详尽的理论分析和定量的理论模拟结果. 最后在北京同步辐射装置(BSRF)上,构建基于PMMA材料的圆柱面型X射线组合折射透镜的微束聚焦实验系统,实际测试了有明显工艺误差和尽量消除工艺误差的两种X射线组合折射透镜的聚焦性能,给出实测结果关键词：X射线组合折射透镜制作工艺误差X射线聚焦性能同步辐射
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| 关 键 词： | X射线组合折射透镜 制作工艺误差 X射线聚焦性能 同步辐射 |
| 收稿时间： | 2009-11-24 |
Study on the focusing performance of the compound X-ray refractive lenses with fabrication errors |
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| Le Zi-Chun,Zhang Ming,Dong Wen,Quan Bi-Sheng,Liu Wei,Liu Kai. Study on the focusing performance of the compound X-ray refractive lenses with fabrication errors[J]. Acta Physica Sinica, 2010, 59(9): 6284-6289 |
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| Authors: | Le Zi-Chun Zhang Ming Dong Wen Quan Bi-Sheng Liu Wei Liu Kai |
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| Affiliation: | Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China;Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China;Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China;Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China;Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China;Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China |
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| Abstract: | The compound X-ray refractive lens is a kind of optical components for X-rays focusing and imaging. This paper reports the authors’ research on focusing performance of the compound X-ray refractive lens with fabrication errors. Firstly SEM measurements of the semi-cylindrical PMMA compound X-ray refractive lens fabricated by means of deep X-ray lithography are performed, and accordingly the fabrication errors are measured. Then the theoretical analysis and simulations are done for the focusing performance of the compound X-ray refractive lens with the fabrication errors. Finally, X-ray microbeam experimental system is built on the 4W1A beamline of Beijing Synchrotron Radiation Facility (BSRF) for measuring the focusing performance of the semi-cylindrical PMMA X-ray refractive lenses we fabricated. And the focusing performances of the semi-cylindrical PMMA compound X-ray refractive lenses with and without distinct fabrication errors are measured and analyzed under 8 keV monochromatic X-rays. |
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| Keywords: | compound X-ray refractive lens fabrication error X-ray focusing synchrontron radiation |
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