Optical properties of hydrogenated amorphous silicon films doped with fluorinated gases |
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Authors: | J M Mndez S Muhl W F Pickin A Ortíz J Licea R Monroy |
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Institution: | Instituto de Investigaciones en Materiales, Universidad Nacional Autonoma de Mexico, Ap. Postal 70-360, Cd. Universitaria, 04510, México D.F., Mexico |
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Abstract: | Doped amorphous silicon films were prepared by plasma-enhanced chemical vapour deposition of silane and hydrogen mixtures, using phosphorus pentafluoride (PF5) and boron trifluoride (BF3) as dopant precursors. The films were studied by UV-vis spectroscopy and their photo and dark conductivity were measured, the latter as a function of temperature. The optical gap of the n-type samples, doped with PF5, diminished as the concentration of this gas in the plasma was increased. However, the optical gap of p-type samples, doped with BF3, did not show any appreciable optical gap decrease as the concentration of BF3 was varied from 0.04% to 4.7%. The dark conductivity of the p-type films at these extremes of the doping range were 7.6 × 10−10 and 3.5 × 10−1 Ω−1 cm−1, respectively. |
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