Three-dimensional non-destructive optical evaluation of laser-processing performance using optical coherence tomography |
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| Authors: | Youngseop Kim Eun Seo Choi Wooseop Kwak Yongjin Shin Woonggyu Jung Yeh-Chan Ahn Zhongping Chen |
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| Institution: | aLaser Imaging Laboratory and Department of Physics, Chosun University, 375 Seosuk-dong, Dong-gu, Gwangju 501-759, Republic of Korea;bBeckman Laser Institute and Department of Biomedical Engineering, University of California at Irvine, Irvine, CA 92612, USA |
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| Abstract: | We demonstrate the use of optical coherence tomography (OCT) as a non-destructive diagnostic tool for evaluating laser-processing performance by imaging the features of a pit and a rim. A pit formed on a material at different laser-processing conditions is imaged using both a conventional scanning electron microscope (SEM) and OCT. Then using corresponding images, the geometrical characteristics of the pit are analyzed and compared. From the results, we could verify the feasibility and the potential of the application of OCT to the monitoring of the laser-processing performance. |
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| Keywords: | Optical coherence tomography (OCT) Non-destructive diagnosis Laser marking |
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