Coplanar Phase Shifters Based on Ferroelectric Thin Films |
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| Authors: | Chunlin Fu Fusheng Pan Hongwei Chen Shucheng Feng Wei Cai and Chuanren Yang |
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| Institution: | (1) School of Metallurgical and Materials Engineering, Chongqing University of Science and Technology, Chongqing, 400050, China;(2) School of Materials Science and Engineering, Chongqing University, Chongqing, 400030, China;(3) State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, 610054, China |
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| Abstract: | Barium strontium titanate (Ba0.6Sr0.4TiO3, short for BST) thin films were prepared by RF-magnetron sputtering. The dielectric tunability, loss tangent, remanent polarization
(2Pr) and coercive electric field (Ec) of the BST films are respectively 29.5%, 0.013, 2.29 μC/cm2 and 22.27 kV/cm at 1 kHz and 20 V. The designed coplanar waveguide (CPW) phase shifter consists of 56 same sections. It is
shown that the fabricated lines of electrodes are smooth and the widths at the tip of bottom electrodes are about 5 μm. At
the central frequency of 28 GHz and a bias voltage of 20 V, the figure of merit is approximately 13°/dB. |
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| Keywords: | Phase shifter Thin film Ferroelectric Coplanar waveguide Barium strontium titanate |
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