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Direct Fabrication of 3D Periodic Inorganic Microstructures using Conformal Phase Masks |
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| Authors: | Matthew C. George Erik C. Nelson John A. Rogers Prof. Paul V. Braun Prof. |
| Affiliation: | Frederick Seitz Materials Research Laboratory, Department of Materials Science and Engineering, University of Illinois at Urbana‐Champaign, Urbana, IL 61801 (USA), Fax: (+1)?217‐333‐2736 |
| Abstract: | |
| Keywords: | nanoimprinting nanolithography photochemistry silsesquioxanes |