Optimization of ETV-ICP-MS conditions for the determination of multi-elements in semiconductor grade acids

The performance of an electro thermal vaporization (ETV) unit as a sample introduction device for an inductively coupled plasma mass spectrometer (quadrupole-ICP-MS) was evaluated. The technique was found to have several advantages over the conventional nebulization method. Some features of ETV-ICP-MS for single element determination have been investigated. Attempts were made to optimize the experimental parameters such as vaporization temperature, vaporization interval and carrier gas flow rate. The study highlights on the determination of Cr, Mn, Al and Na. A compromise condition for multi-element determination was suggested and tested from single-element optimum conditions obtained. 25 L solution was used for the analysis. Results obtained for the analysis of conc. HCl samples are also reported.