Mass spectrometry study of the kinetics of CdTe molecular-beam epitaxy: Part II. Cd, Te2, Te, and CdTe

The results of an in situ mass-spectrometric study of surface processes occurring during CdTe molecular beam epitaxy are presented. The measurements of kinetic parameters are performed with modulated Cd and Te₂ molecular beams with an intensity of 0.1–5.0 ML/s at a crystal temperature of 550–730 K. The experimental results are treated using a model in which condensation and evaporation proceed through adsorption and desorption steps. The desorption rates are 2–15 and 150 s^?1 for Te₂ and Cd, respectively. The activation energy of CdTe “evaporation” is found to be 1.2 eV; the desorption energies are E _d(Cd) = 1.0 eV and E _d(Te₂) = 0.3 eV. The adsobate coverage with cadmium atoms and tellurium molecules is estimated to be n(Cd) < 0.01, n(Te₂) = 0.02–0.20, and n(Te) = 0.2–1.0.