| 薄膜和多层膜的X射线散射方法与应用 |
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| 引用本文： | 张爱梅, 吴小山. 薄膜和多层膜的X射线散射方法与应用[J]. 物理, 2007, 36(07): 516-523. |
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| 作者姓名： | 张爱梅 吴小山 |
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| 作者单位： | 1.南京大学固体微结构物理国家重点实验室 南京大学物理系210093 |
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| 摘 要： | 文章主要介绍了几种X射线散射技术，包括X射线小角反射技术、X射线漫散射技术、掠入射X射线衍射和多晶薄膜的小角衍射技术。通过具体的事例说明这些X射线散射方法在薄膜研究中的应用。
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| 关 键 词： | 薄膜 X射线散射 微结构 |
X-ray scattering methods for films and multilayers and their applications |
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| X-ray scattering methods for films and multilayers and their applications[J]. PHYSICS, 2007, 36(07): 516-523. |
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| Affiliation: | 1.南京大学固体微结构物理国家重点实验室 南京大学物理系210093 |
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| Abstract: | Several X-ray diffraction/scattering techniques, including grazing incident X-ray reflectivity, transverse X-ray diffuse scattering, grazing incident X-ray diffraction and X-ray small-angle diffraction, for the characterization of films and multilayers are described. Three examples are given to show the application of these methods. |
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| Keywords: | film X-ray scattering microstructure |
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