| 真空紫外双等离子体光源的研究 |
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| 引用本文： | 李福田,钱莉民.真空紫外双等离子体光源的研究[J].光谱学与光谱分析,1992,12(3):19-24. |
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| 作者姓名： | 李福田 钱莉民 |
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| 作者单位： | 中国科学院长春光机所，中国科学院长春光机所 130022 长春，130022 长春 |
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| 基金项目： | This paper was supported by National Natural Science Foundation of China. |
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| 摘 要： | 本文描述我们研制的真空紫外双等离子体光源的设计、结构及工作原理,讨论真空紫外性能测试,给出光源的真空紫外辐射特性测试结果。
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| 关 键 词： | 光源 真空紫外辐射 真空紫外光谱 |
INVESTIGATION ON VUV DUOPLASMATRON SOURCE |
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| LI Futian QIAN Limin Changchun Institute of Optics and Fine Mechanics,Academia Sinica,P. O. Box , Changchun.INVESTIGATION ON VUV DUOPLASMATRON SOURCE[J].Spectroscopy and Spectral Analysis,1992,12(3):19-24. |
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| Authors: | LI Futian QIAN Limin Changchun Institute of Optics and Fine Mechanics Academia Sinica P O Box Changchun |
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| Institution: | LI Futian QIAN Limin Changchun Institute of Optics and Fine Mechanics,Academia Sinica,P. O. Box 1024,130022 Changchun |
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| Abstract: | This paper describes the design, the structure and the working principle of the duoplasmatron source developed in our lab, discusses the performence evaluation in the VUV spectral range, and finally gives the measurement results of VUV spectral radiation performence of the source. |
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| Keywords: | Source VUV radiation VUV Spectrum |
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