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非线性变周期全息光栅的制作
引用本文:陈新之.非线性变周期全息光栅的制作[J].光子学报,1990,19(2):171-173.
作者姓名:陈新之
作者单位:中科院上海光机所
摘    要:叙述一种用发散光束来的制作变周期光栅的方法,简单的系统保证了两束形成全息干涉的光强相等这一点对获得高反衬结构的光栅图形是重要的。在显影过程中用He-Ne激光作为衍射效率的在位监控。

关 键 词:全息光栅  变周期全息光栅的制作

THE FABRICATION METHOD OF HOLOGRAPHIC CHIRPED GRATINGS
Chen Xinzhi.THE FABRICATION METHOD OF HOLOGRAPHIC CHIRPED GRATINGS[J].Acta Photonica Sinica,1990,19(2):171-173.
Authors:Chen Xinzhi
Institution:Chen XinzhiShanghai Institute of Optics and Fine Mechanics,Academia Sinica
Abstract:Gratings with varible periodes (chirped gratings) have been fabricated by recor-ding the interference pattern of a converging beam. The simple system ensures that the two beams forming the holographic grating have equal intensities. This is crucial for obtaining high aspect-ratio structures. We use a He-Ne laser beam for observing the efficiency of diffration grating as development proceeds.
Keywords:Holographic gratings  Fabrication of holographic chirped grafings
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