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Novel magnetorheological figuring of KDP crystal
Authors:Xiaoqiang Peng  Feifei Jiao  Haofeng Chen  Guipeng Tie  Feng Shi  Hao Hu College of Mechatronics Engineering  Automation  National University of Defense Technology  Changsha  China
Institution:Xiaoqiang Peng,Feifei Jiao,Haofeng Chen,Guipeng Tie,Feng Shi,and Hao Hu College of Mechatronics Engineering and Automation,National University of Defense Technology,Changsha 410073,China
Abstract:A new process of magnetorheological figuring(MRF) based on the deliquescence theory is proposed to finish KDP crystals.A novel,non-aqueous,and abrasive-free magnetorheological(MR) fluid is explored,and polishing experiments are performed on a self-developed MRF machine.The removal mechanism is reckoned to be the result of a combination of dominant chemical etching and accessorial mechanical drag.The results indicate that the surface roughness of I plate KDP of 80 × 80(mm) polished by MRF is 1.2 nm(root mean square(RMS)),and the tool marks are completely removed.The surface accuracy by MRF is 0.035λ(RMS),and the low/middle-frequency errors are significantly corrected after MRF.
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