Epoxy replication of hard X-ray supermirrors |
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| Authors: | Fangfang Wang Wenbin Li Qiushi Huang Jingtao Zhu Baozhong Mu Zhanshan Wang Institute of Precision Optical Engineering |
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| Institution: | Fangfang Wang,Wenbin Li,Qiushi Huang,Jingtao Zhu,Baozhong Mu,and Zhanshan Wang Institute of Precision Optical Engineering,Department of Physics,Tongji University,Shanghai 200092,China |
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| Abstract: | The direct replication of W/Si supermirrors is investigated systematically. W/Si supermirrors are fabricated by direct current(DC) magnetron sputtering technology. After deposition,the supermirrors are replicated from the supersmooth mandrels onto ordinary float glass substrates by epoxy replication technique. The properties of the supermirrors before and after the replication are characterized by grazing incidence X-ray reflectometry(GIXR) measurement and atomic force microscope(AFM) . The results show tha... |
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