Non-scanning,non-interferometric,three-dimensional optical profilometer with nanometer resolution

A non-scanning,non-interferometric,three-dimensional(3D) optical profilometer based on geometric optics,critical angle principle,and the use of a charge-coupled device(CCD) camera is presented.The surface profile of the test specimen can be transferred into the reflectance profile.The reflectance profile,obtained from a CCD,is the ratio of the intensity at the critical angle to the intensity obtained at the total internal reflection angle.The optical profilometer provides a sub-micron measuring range with n...