Ultra-precision figuring using submerged jet polishing |
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Authors: | Chunyan Shi Jiahu Yuan Fan Wu Yongjian Wan Institute of Optics Electronics Chinese Academy of Sciences Chengdu China |
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Institution: | Chunyan Shi,Jiahu Yuan,Fan Wu,and Yongjian Wan Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China |
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Abstract: | A new removal optimization method called submerged jet polishing(SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic(PV) 0.066 λ to 0.024 λ(λ = 632.8 nm) after three iterations,and the root mean square(RMS) value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces. |
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