多角度光谱测量法制备短波通滤光膜技术

详细论述了短波通滤光膜的理论设计与实际制备结果,光谱曲线偏离的原因及修正方法。首先选择高、低折射率膜料设计短波通滤光膜系,然后进行实际膜系制备。由于镀膜机存在控制误差,使得实际膜层制备厚度偏离理论厚度,导致实际制备光谱曲线超差。通过利用多角度光谱测量法对制备结果进行测量,依据多次测量结果的曲线偏离量,判断产生膜层厚度误差的膜料、膜层厚度误差的偏差大小及方向。在修正膜层厚度误差后,制备了光谱曲线平坦变化的短波通滤光膜。这种光谱性能更好的短波通滤光膜可以避免光学系统的偏色效应,此项技术为短波通滤光膜的设计与加工提供了新的理论依据与制备方案。

Preparation of Short Wave Pass Filter by Multi Angle Spectrum Measurement

The reason for the deviation of the spectrum curve between the theoretical design and the actual preparation of the short wave pass filter and the correction method are discussed in detail. At first, the high and low refractive index materials are selected to design the short wave pass filter system. And then, the actual film system is prepared. Due to the control error of the coating machine, the actual film preparation thickness deviating from the theoretical thickness, the actual preparation spectral curve out of tolerance is produced. By using multi angle spectrum measurement method to measure the preparation results, according to the curve deviation from multi measurement results, the film material resulting film thickness deviation, the deviation size and direction are determined.After correcting the film thickness deviation, the short wave pass filter with flat spectral curve is prepared. And the short wave pass filter film with better spectral performances can avoid the chromatic aberration effect of optical systems.