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Synthesis of three-dimensional phase images of nanoobjects: Numerical simulation |
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| Authors: | G G Levin G N Vishnyakov Ya A Ilyushin |
| Institution: | 1. All-Russia Scientific-Research Institute of Optical-Physical Measurements, Moscow, 119361, Russia 2. Moscow State University, Moscow, 119992, Russia 3. Institute of Radioengineering and Electronics, Russian Academy of Sciences, Moscow, 103907, Russia |
| Abstract: | A way to synthesize three-dimensional phase-diffraction images of nanoobjects is proposed based on the numerical method of backward propagation of a field from the best focusing plane. The obtained phase images are used for solving the applied problem of object defect finding by methods of pattern recognition. The probability of defect detection by phase images is shown to be higher than for amplitude images. |
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