共面介质阻挡放电特性研究

对共面介质阻挡放电(DBD)的放电过程进行了实验和理论研究. 在实验中设计了分段电极方法来获取放电过程中不同位置上的局域电流和光辐射特性，得到了阴极上等离子体的扩展速度，并与二维流体数值模拟结果进行了比较. 结果表明，在共面DBD的暂态放电过程中，电极上空等离子体区域始终存在有不均匀电场，导致了不同位置上放电电流和光辐射分布的不一致. 同时研究还表明，在DBD放电过程中应当考虑表面光致二次电子发射. 关键词： 介质阻挡放电 分段电极 放电特性

Study of characteristics of coplanar dielectric barrier discharge

The process of coplanar dielectric barrier discharge (DBD) has been investigated experimentally and theoretically by using a segmented-electrode system. The local discharge current, light emission intensity and the developing velocity of plasma on the cathode were obtained. The results of the experiment and the two-dimension fluid modeling are compared. It was shown that there exists a non-uniform field in plasma region which causes the disagreement between the local discharge and the light emission during the discharge development in coplanar DBD. The secondary electron emission producod by photon bombardment on the dielectric surface should be taken into account in studying DBD.