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1700 线/mm镀金光栅的拼接理论和实验研究
引用本文:左言磊,魏晓峰,朱启华,刘红婕,王逍,黄征,郭仪,应纯同.1700 线/mm镀金光栅的拼接理论和实验研究[J].物理学报,2007,56(9):5233-5236.
作者姓名:左言磊  魏晓峰  朱启华  刘红婕  王逍  黄征  郭仪  应纯同
作者单位:(1)清华大学工程物理系,北京 100084; (2)中国工程物理研究院,绵阳 621900; (3)中国工程物理研究院,绵阳 621900;清华大学工程物理系,北京 100084
基金项目:国家高技术研究发展计划(863计划);高温高密度等离子体物理国防科技重点实验室项目
摘    要:提出了一个能够实时地监控拼接光栅状态的方案;理论上论证了氦氖光不能用来实时监控1740线衍射光栅的光栅拼接实验;提出了一种选择监控光波长的方法,使得拼接光栅的各种误差对于主光束和监控光的影响是一致的,并且通过实验进行了验证. 关键词: 拼接光栅 刻线密度误差 实时监控 光栅对压缩池

关 键 词:拼接光栅  刻线密度误差  实时监控  光栅对压缩池
文章编号:1000-3290/2007/56(09)/5233-04
收稿时间:2006-11-09
修稿时间:2006-11-09

Theoretical and experimental study of grating tiling
Zuo Yan-Lei,Wei Xiao-Feng,Zhu Qi-Hua,Liu Hong-Jie,Wang Xiao,Huang Zheng,Guo Yi,Ying Chun-Tong.Theoretical and experimental study of grating tiling[J].Acta Physica Sinica,2007,56(9):5233-5236.
Authors:Zuo Yan-Lei  Wei Xiao-Feng  Zhu Qi-Hua  Liu Hong-Jie  Wang Xiao  Huang Zheng  Guo Yi  Ying Chun-Tong
Institution:1 Chinese Academy of Engineering Physics, Mianyang 621900, China; 2 Departrnent of Engineering Physics , Tsinghua University , Beifing 100084 , China
Abstract:A detailed scheme by which the status of tiled gratings can be inspected in a real-time way is put forward. The He-Ne laser is shown to be inappropriate for the grating-tiling experiment where 1740/mm grating is used. A method is proposed by which the wavelength can be selected for the real-time measurement, so that the impact of all sorts of errors of the tiled gratings on the main beam(1053nm) and the beam for measurement is completely identical, which has been demonstrated by experiment.
Keywords:tiled gratings  groove-width error  real-time inspection  grating-pair compressor
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