Probe diagnostics op the planar magnetron discharge |
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| Authors: | L Bárdoš M Libra A P Krusteva |
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| Institution: | (1) Institute of Physics, Czech. Acad. Sci., Na Slovance 2, 180 40 Prague 8, Czechoslovakia;(2) Tesla Hole ovice, concern Jankovcova 15, 170 04 Prague 7, Czechoslovakia;(3) Higher Inst. for Mechanical and Electrical Engineering, Power Electr. Dept., 1156 Sofia, Bulgaria |
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| Abstract: | Magnetron discharge during Ti sputtering was examined by Langmuir probe. Electron densities and energies were determined at different Ar pressures, dc. powers and distances from magnetron target. Values in order of 1015m–3 and 1eV were measured even at distances up to 15 cm.The authors are grateful to Ing. J. Musil, DrSc. and Ing. A.  prachta, CSc. for supporting this work. Helpful discussion with RNDr. S. Kadlec are also gratefully acknowledged. |
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