Scattering of excited atoms due to ion bombardment of metals

The spectrum and the spatial distribution of the emission of scattered particles upon bombardment of Be, Ti, Ta, and W with H and He ions were studied. The quantum yield and the velocity and angular distributions of the scattered excited particles were measured. Computer simulation of the scattering of H ions and He ions from the metals under study was performed with the use of the program TRIM-95. Agreement is observed between the calculated and experimentally measured angular distributions of the scattered particles.