正弦相位调制式全光纤微位移测试仪 |
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引用本文: | 王惠文
,李乃吉
,顾生华
,孔小键.正弦相位调制式全光纤微位移测试仪[J].光学技术,1992(6). |
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作者姓名: | 王惠文 李乃吉 顾生华 孔小键 |
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摘 要: | 利用正弦相位调制干涉技术检测微小位移,精度可达纳米量级。采用全光纤光路,结构简单,并可实时非接触测量。
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Sinusoidal phase-modulating optical fibre fine-displacement tester |
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Abstract: | By using sinusoidal phase-modulating interferometric technique, the testing of fine displacement can achieve nanometer accuracy. If an all-fibre optical system is used, the structure of the tester will be simple and the real-time noncontact testing can be carried out. |
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