RF-sputtered LiCoO2 thick films: microstructure and electrochemical performance as cathodes in aqueous and nonaqueous microbatteries

Films of LiCoO₂ are prepared on metallized silicon substrates using RF-magnetron sputtering technique. The microstructural properties of the films are investigated by X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. The films deposited at a substrate temperature of 250 °C with subsequent annealing at 650 °C exhibited hexagonal layered structure with R $ \overline 3 $ m symmetry. The kinetics of lithium ions in LiCoO₂ film cathode host matrix and its cycleability are studied in aqueous Pt//LiCoO₂ and nonaqueous Li//LiCoO₂ cell. Both the electrochemical cells at same current density of 50 μA cm^?2 delivered the same initial discharge capacity of about 60 μA h?cm^?2 μm^?1 with a chemical diffusion coefficient of ca. 10^?11 cm² s^?1 for Li⁺ ions. The capacity fade rates for the Pt//LiCoO₂ and Li//LiCoO₂ cells, in average are 3.0 and 0.15 % per cycle, respectively, for the first 20 cycles. The Pt//LiCoO₂ cell is found to be advantageous for small number of cycles and is cost effective than the Li//LiCoO₂ cell.