| 软X射线聚焦波带片制备工艺的研究 |
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| 引用本文： | 傅绍军 洪义麟. 软X射线聚焦波带片制备工艺的研究[J]. 光学学报, 1995, 15(8): 148-1150 |
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| 作者姓名： | 傅绍军 洪义麟 |
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| 作者单位： | 中国科技大学国家同步辐射实验室 |
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| 摘 要： | 利用全息光刻和离子束刻蚀技术制作了用于软Ｘ射线聚焦和色散的三种参数的高精度菲涅耳波带片，给出了实验结果。
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| 关 键 词： | 聚焦滤带片 同步辐射 离子束刻蚀 |
| 收稿时间： | 1994-06-18 |
Fabrication of Soft X-Ray Condenser Zone Plates |
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| Fu Shaojun, Hong Yilin, Tao Xiaoming, Su Yonggang. Fabrication of Soft X-Ray Condenser Zone Plates[J]. Acta Optica Sinica, 1995, 15(8): 148-1150 |
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| Authors: | Fu Shaojun Hong Yilin Tao Xiaoming Su Yonggang |
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| Abstract: | oft x-ray condenser zone plates with three kinds of parameters are fabricated by holograph-ion beam etching technique. Zone plate condensers are used in our soft xray microscopy experiments which act in combination with a pinhole as a linear monochromator. |
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| Keywords: | condenser zone plate synchrotron radiation holograph-ion beametching |
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