|
|||||
|
|
VO2-Based Infrared Microbolometer Array |
|
| Authors: | Xinjian Yi Sihai Chen Yingrui Wang Bifeng Xiong Hongchen Wang |
| Affiliation: | (1) Deparment of Optoelectronic Engineering, Huazhong University of Science & Technology, Wuhan, 430074, China;(2) Aerospace Group of Science & Technology, 25th Research Institute, Beijing, 100854, China;(3) State Key Laboratory for Imaging Recognition & Intelligence Control, Huazhong University of Science & Technology, Wuhan, 430074, China |
| Abstract: | V02-based thin film materials on silicon substrates are fabricated by ion beam sputtering and a post-annealing which is different from the conventional fabricating method. An infrared linear microbolometer array with 128 pixels is prepared using as-deposited vanadium dioxide thin films. Optical and electrical properties for V02-based microbolometer array are tested. |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |