| 高精度激光三角位移测量系统误差分析 |
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| 引用本文： | 何凯,陈星,王建新,张勤耀. 高精度激光三角位移测量系统误差分析[J]. 光学与光电技术, 2013, 11(3): 62-66 |
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| 作者姓名： | 何凯 陈星 王建新 张勤耀 |
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| 作者单位： | 中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海,200083 |
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| 摘 要： | 激光三角测量方法因其具有结构简单、非接触、信号处理便捷等特点而得到广泛应用。针对工程应用中提出的高精度、大工作距离的测量要求,从激光三角位移传感器结构、光斑定位不确定度和定标方法等方面进行分析,分别讨论了各个因素对于测量精度的影响,并提出了优化方案。经实验验证,该激光三角位移测量系统在110mm的工作距离下测量误差小于1.2μm,优于在同等工作条件下的商用激光三角位移传感器。
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| 关 键 词： | 激光三角法 光斑定位 二次法定标 光电探测器 非接触测量 |
Analysis of Error in High Precision Laser Triangulation Displacement Measurement System |
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| HE Kai,CHEN Xing,WANG Jian-xin,ZHANG Qin yao. Analysis of Error in High Precision Laser Triangulation Displacement Measurement System[J]. optics&optoelectronic technology, 2013, 11(3): 62-66 |
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| Authors: | HE Kai CHEN Xing WANG Jian-xin ZHANG Qin yao |
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| Affiliation: | ( Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics Chinese Academy of Sciences, Shanghai 200083, China) |
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| Abstract: | Laser triangulation is widely applied due to its simple setup, contactless feature and fast data processing. In ibis paper, the technique is analyzed from the perspectives of light path structure, spot locating uncertainty and calibration meth od, aiming at high precision, large work distance measurements. The effects of above mentioned factors on measuring aceuracy are discussed, and an optimal scheme is proposed. Experimental results demonstrate that the measurement error of line present sensing system is below 1μm at a work distance of 110mm, better than that of a commercial laser triangulation sensor. |
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| Keywords: | laser triangulation spot locating uncertainty parabolic calibration photoelectric detector non-contact measurement |
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