Summary of ISO/TC 201 Standard: ISO 18115‐1:2013 – Surface chemical analysis – Vocabulary – General terms and terms used in spectroscopy |
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Authors: | Martin P. Seah |
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Affiliation: | Analytical Science Division, NPL, , Teddington, Middlesex, UK |
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Abstract: | Amendments have been made to International Standards Organization (ISO) 18115‐1:2010 extending the number of terms and, in a few cases where usage has changed, incorporating revisions. Part 1 covers 600 terms used in Auger electron spectroscopy, elastic peak electron spectroscopy, reflected electron energy loss spectroscopy, SIMS, UPS, XPS, etc. as well as 75 acronyms. The terms cover words or phrases used in describing the samples, instruments and theoretical concepts involved in surface chemical analysis. © 2014 Crown copyright. Surface and Interface Analysis © 2014 John Wiley & Sons, Ltd. |
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Keywords: | AES AFM instrumentation samples SIMS surface analysis terminology vocabulary XPS |
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