| 多层光学薄膜周期厚度的双晶X射线掠入射研究 |
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| 引用本文： | 李学千,宋晓伟,曲轶,李梅,张兴德.多层光学薄膜周期厚度的双晶X射线掠入射研究[J].光学技术,1998(5). |
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| 作者姓名： | 李学千 宋晓伟 曲轶 李梅 张兴德 |
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| 作者单位： | 长春光学精密机械学院高功率半导体激光国家重点实验室 |
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| 摘 要： | 阐述了掠入射Ｘ射线测量薄膜厚度的条件，讨论和分析了掠入射Ｘ射线测量多层薄膜厚度的干涉原理和方法。利用双晶Ｘ射线衍射仪对多层光学薄膜的周期厚度进行了掠入射小角度测量，获得了令人满意的结果，测量值与设计值极好地吻合。
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| 关 键 词： | X射线衍射，掠入射，多层膜，厚度测量 |
Study of periodic thickness of multilayer optical thin films by double crystal grazing incident X ray |
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| Li Xueqian,Song Xiaowei,Qu Yi,Li Mei,Zhang Xingde.Study of periodic thickness of multilayer optical thin films by double crystal grazing incident X ray[J].Optical Technique,1998(5). |
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| Authors: | Li Xueqian Song Xiaowei Qu Yi Li Mei Zhang Xingde |
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| Abstract: | The measuring conditions of thin films thickness with grazing incident X ray is explained, and interferential principle and method of thickness measurement of multilayer thin films by grazing incident X ray are analyzed. Periodic thickness of multilayer optical thin films is measured with double crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values. |
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| Keywords: | X ray diffraction grazing incidence multilayer films thickness measurement |
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