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纳秒激光微加工系统的实现
引用本文:刘春阳,傅星,邬泳.纳秒激光微加工系统的实现[J].应用激光,2008,28(3).
作者姓名:刘春阳  傅星  邬泳
作者单位:天津大学,精密测试技术及仪器国家重点实验室,天津,300072
摘    要:介绍了自行设计的纳秒激光微加工系统的组成和结构,各个部分的功能作用和工作原理,以及基于DSP和FPGA的硬件电路设计.分析了脉冲重复率、激光能量以及二维运动平台速度等参数对加工效果的影响,优化改善了脉冲式激光与二维平台运动的配合.整个系统结构简单,控制方便,稳定可靠,实现了高效率高精度的微加工.

关 键 词:纳秒激光  微加工系统  脉冲重复率  DSP  FPGA  纳秒激光  微加工系统  System  Laser  Micromachining  精度  效率  稳定  控制  结构简单  配合  运动平台  脉冲式  优化改善  影响  加工效果  参数  速度  激光能量  脉冲重复率  分析

Design and Implement of Nanosecond Laser Micromachining System
Liu Chunyang,Fu Xing,Wu Yong.Design and Implement of Nanosecond Laser Micromachining System[J].Applied Laser,2008,28(3).
Authors:Liu Chunyang  Fu Xing  Wu Yong
Institution:Liu Chunyang,Fu Xing,Wu Yong(State Key Laboratory of Precision Measuring Technology , Instruments Tianjin University,Tianjin 300072,China)
Abstract:The design of nanosecond laser micromachining system is presented,including the role,the function and the principle of every part,the hardware design of the system based on DSP and FPGA is also introduced.The experiments focused on the repetition rate,the energy of the laser and the speed of the two dimensional mechanical platform are analyzed.By resolving the problem on the cooperation of the control of the laser and the platform movement,good performance can be achieved with high accuracy.Above all,the sy...
Keywords:Nanosecond laser  micromachining  pulse repetition rate  DSP  FPGA  
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