| 发射光谱法研究CaO对等离子体刻蚀废气的吸收作用 |
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| 引用本文： | 刘慧杰.发射光谱法研究CaO对等离子体刻蚀废气的吸收作用[J].光谱实验室,2005,22(1):130-133. |
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| 作者姓名： | 刘慧杰 |
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| 作者单位： | 东莞理工学院电子系,广东省,东莞市,523106 |
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| 摘 要： | 以 CF4/ Ar作为等离子体刻蚀废气的模拟气体 ,经电感耦合等离子放电之后 ,通过 Ca O固体粉末进行废气的吸收 ,测得吸收废气的 Ca O的发射光谱。与模拟刻蚀废气光谱比较可知 ,Ca O可除去废气中70 %的 F元素 ,并给出了未能全部清除的原因。
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| 关 键 词： | 发射光谱法 等离子刻蚀 氟 废气 CaO |
| 文章编号： | 1004-8138(2005)01-0130-04 |
| 修稿时间： | 2004年9月2日 |
The Absorption of CaO to Waste Gas from Plasma Etching. by Emission Spectrometry |
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| LIU Hui-Jie.The Absorption of CaO to Waste Gas from Plasma Etching. by Emission Spectrometry[J].Chinese Journal of Spectroscopy Laboratory,2005,22(1):130-133. |
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| Authors: | LIU Hui-Jie |
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| Abstract: | The simulated waste gas of plasma etching was composed of CF 4 and Ar,and disch arged by ICP.The CaO powder was used to absorb the waste gas,and emission spectr um was taken.Calculated from the emission spectra before and after CaO absorptio n,70% of fluoride in waste gas was eliminated.The reasons for the remaining fluo ride were given. |
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| Keywords: | Emission Spectrometry Plasma Etching Fluorine Waste Gas CaO |
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