| 微机械继电器的研究及进展 |
| |
| 引用本文： | 刘本东,李德胜.微机械继电器的研究及进展[J].微纳电子技术,2007,44(2):88-92,110. |
| |
| 作者姓名： | 刘本东 李德胜 |
| |
| 作者单位： | 北京工业大学,机电学院,北京,100022 |
| |
| 基金项目： | 国家高技术研究发展计划(863计划) |
| |
| 摘 要： | 对静电驱动微继电器、热驱动微继电器和电磁驱动微继电器的驱动原理和特点分别进行了分析, 介绍了国内外具有代表性的几种微继电器的结构、制作工艺、关键部件的尺寸, 并探索了静电驱动、热驱动和电磁驱动微继电器的发展前景。
|
| 关 键 词： | 微继电器 微驱动器 微机电系统 |
| 文章编号： | 1671-4776（2007）02-0088-05 |
| 修稿时间： | 2006-09-15 |
Research and Development of Micromachining Relay |
| |
| LIU Ben-dong,LI De-sheng.Research and Development of Micromachining Relay[J].Micronanoelectronic Technology,2007,44(2):88-92,110. |
| |
| Authors: | LIU Ben-dong LI De-sheng |
| |
| Institution: | College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100022, China |
| |
| Abstract: | The principle and characteristics of electrostatic microrelay,electromagnetic microrelay and electrothermal microrelay were analyzed. The structure,fabrication process and dimensions of the key part of several representative microrelays were introduced,and the potential perspective of electrostatic microrelay,electromagnetic microrelay and electrothermal microrelay were discussed. |
| |
| Keywords: | microrelay micro actuator MEMS |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
