Automated Mueller matrix ellipsometry |
| |
Authors: | P.S. Hauge |
| |
Affiliation: | IBM Thomas J. Watson Research Center Yorktown Heights, N.Y. 10598, USA |
| |
Abstract: | The application of rotating-compensator ellipsometry (RCE) to measurements of the system Mueller matrix M of linear optical systems is reported. This technique extends a previously reported procedure for automated Jones matrix ellipsometry to include systems that depolarize light. |
| |
Keywords: | |
本文献已被 ScienceDirect 等数据库收录! |