Measurement of surface roughness properties by means of laser speckle techniques |
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Authors: | H. Fuji T. Asakura Y. Shindo |
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Affiliation: | Research Institute of Applied Electricity, Hokkaido University, Sapporo, Hokkaido, Japan |
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Abstract: | The statistical properties of speckle intensity variations produced by coherent light in the far-field diffraction plane of an iluminated area of an object are studied experimentally as a function of the radius of an illuminating beam over the object and are found to have a relation to its surface roughness and correlation lenght. Measurements of the surface roughness and the correlation lenght become possible by investigating the contrast variation of the speckle intensity as a function of the radius of the illuminating beam. |
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