连续表面微透镜列阵元件检测

系统分析了连续表面微透镜列阵的几何参量和光学性能的检测方法和评价标准,针对典型的折射型聚焦列阵元件,给出其结构尺寸及光学性能的测试结果,两者结果一致.从而建立了一套通过测试元件的几何参量、加工误差及光学性能指标来综合评估微光学元件性能的方法.

Measurement of the Continuous Surface Microlens Array

A method is proposed for measuring and evaluating the continuous surface microlens array. The optical performance is determined by the geometrical parameters and the quality of the element related to the accuracy of size and profile as well as roughness, and the fabrication errors definetly exist during the micro fabrication procedure, it is necessary to measure them precisely for controlling them to a certain degree. The structural sizes, surface shape error were analyzed, and the measured results are given against the typical refractive microlens array. The optical performances of the microlens array are evaluated through measuring the structural sizes and processing errors.