Characterization of the signature of subwavelength variation from far-field irradiance |
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| Authors: | Chu Shu-Chun Chern Jyh-Long |
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| Affiliation: | Institute of Electro-Optical Engineering, Microelectronics and Information System Research Center, National Chiao Tung University, Hsinchu 300, Taiwan. scchu.eo92g@nctu.edu.tw |
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| Abstract: | The dynamic signature of the subwavelength variation of a slit is shown to be determinable from far-field irradiance with a precision of better than 1 nm. One can increase the efficiency of measurement of the subwavelength's signature by adjusting the detection width over which the subwavelength variation is detected. The subwavelength variation of a rectangular aperture was also examined to show the general feasibility. |
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