FTIR光谱仪中基于定镜调整的动镜运动控制研究

动镜是FTIR光谱仪中唯一不断运动的部件，动镜的匀速运动性能以及动镜与定镜的准直性好坏影响干涉效果和光谱图质量，直接制约着仪器的精度和分辨率，对仪器整体指标起着重要作用。文章围绕FTIR光谱仪中干涉仪动镜运动的匀速性以及其与定镜的准直性展开研究，使用相位检测技术对定镜的姿态作出动态调整以补偿动镜与定镜间的倾斜夹角，并且设计了具有磁悬浮特点的动镜支撑系统。文章采用改进的模糊PID控制算法实现动镜运动速度的精确调节，对该控制方案从硬件设计和算法上实现。结果表明所研发的动镜运动控制系统具有足够的精度和实时性，能够保证FTIR光谱仪中干涉仪所需的准直性及动镜匀速性的要求。

Motion Control of Moving Mirror Based on Fixed-Mirror Adjustment in FTIR Spectrometer

The performance of the uniform motion of the moving mirror, which is the only constant motion part in FTIR spectrometer, and the performance of the alignment of the fixed mirror play a key role in FTIR spectrometer, and affect the interference effect and the quality of the spectrogram and may restrict the precision and resolution of the instrument directly. The present article focuses on the research on the uniform motion of the moving mirror and the alignment of the fixed mirror. In order to improve the FTIR spectrometer, the maglev support system was designed for the moving mirror and the phase detection technology was adopted to adjust the tilt angle between the moving mirror and the fixed mirror. This paper also introduces an improved fuzzy PID control algorithm to get the accurate speed of the moving mirror and realize the control strategy from both hardware design and algorithm. The results show that the development of the moving mirror motion control system gets sufficient accuracy and real-time, which can ensure the uniform motion of the moving mirror and the alignment of the fixed mirror.