Breakdown magnetic field in an inductively coupled plasma |
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Authors: | Karel Burm |
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Affiliation: | Corus Research Development and Technology, PO Box 10.000, 1970 CA Ijmuiden, The Netherlands |
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Abstract: | The Paschen curve shows that the breakdown voltage over a gap is a non-linear function of the product of the gas pressure and the gap distance for plasmas which are generated inside an electric field driven source. The Paschen breakdown relationship does not depend on the applied frequency and covers secondary emission at the electrodes of the discharge. Adapting the Paschen curve, a breakdown curve for a time-dependent magnetic field, typical for inductively coupled plasmas which sources are without electrodes, is examined here. It is shown that in this case the magnetic field breakdown curve does depend on the applied frequency. |
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