The role of dissociative electron attachment to metal halides in a low-pressure glow discharge

The conditions are analyzed under which the dissociative attachment of electrons determines the properties of a nonequilibrium glow discharge plasma containing metal halides. The possibility of applying a simplified approach for the estimation of dissociative attachment and vibrational excitation cross sections of metal halides by combining quantum and semiclassical methods is discussed. By way of example, processes in a nonequilibrium Ar-SnI₂ plasma are analyzed in detail.