The role of dissociative electron attachment to metal halides in a low-pressure glow discharge |
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| Authors: | S O Adamson M A Deminskii A V Zaitsevskii B V Potapkin M Ya Tudorovskaya and I V Chernysheva |
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| Institution: | (1) Faculty of Mathematics and Physics, Charles University, V Hole ovi kách 2, CZ-180 00 Praha 8, Czech Republic |
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| Abstract: | The conditions are analyzed under which the dissociative attachment of electrons determines the properties of a nonequilibrium
glow discharge plasma containing metal halides. The possibility of applying a simplified approach for the estimation of dissociative
attachment and vibrational excitation cross sections of metal halides by combining quantum and semiclassical methods is discussed.
By way of example, processes in a nonequilibrium Ar-SnI2 plasma are analyzed in detail. |
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