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High Quality AlN with a Thin Interlayer Grown on a Sapphire Substrate by Plasma-Assisted Molecular Beam Epitaxy |
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| Authors: | REN Fan HAO Zhi-Biao ZHANG Chen HU Jian-Nan LUO Yi |
| Affiliation: | Tsinghua National Laboratory for Information Science and Technology, State Key Laboratory on Integrated Optoelectronics, and Department of Electronic Engineering, Tsinghua University, Beijing 100084 |
| Abstract: | |
| Keywords: | 81.05.Ea 81.15.Hi 61.72.Dd |
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